Tag: Institut für Mikroelektronik- und Mechatronik-Systeme

Dr. Rainer Gloess, Head of Advanced Mechatronics at PI: "If the system moves on a circular path with a diameter of 100 nm, for example, the maximum deviation from the ideal line is only a few nanometers." (Photo: PI)
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Application-orientated research boosts drive technology

A two-dimensional, optically incremental measurement system records the position with capacitive sensors…

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