Physik Instrumente release linear motor stage

Precision motion control and nanopositioning company Physik Instrumente (PI) released a new high-dynamics linear motor stage family, the V-574 for scanning, measuring, imaging and alignment applications.

Designed for guiding precision and frictionless three-phase linear motors the V-574 range is equipped with high-precision crossed roller bearings installed in a proprietary process.

Preliminary data shows the V-574 to have 0.2µm of absolute accuracy whilst supplying a 20µm and 4µm pitch incrementally.

Flatness over the full travel range and 1.2µm straightness are the two key features of the 130mm variant. This provides a pitch of 45 yaw 40µrad. The 130mm variant is one of three, with the others being 60mm and 230mm.

The V-574 reaches velocities of up to 1m/s and 1g acceleration. These speeds are possible due to the ironless, cog-free linear motors transferring its force directly to the motion platform. This is frictionless and eliminates backlash and play.

Two 1Vpp sine/cosine encoders are available for selection for traditional motion controllers whilst an absolute encoder with BiSS-C transfer protocol is also available. Using an absolute encoder grants 1nm resolution and after power-up can transmit the current stage position to the controller immediately. This can be done without referencing and without losing encoder counts in electrically noisy environments.

Using linear motors allows for very smooth motion with a high dynamic velocity range. It can also achieve faster acceleration, making it good for applications requiring high or extremely constant velocity such as optics inspection, metrology, photonics, interferometry and semiconductor test equipment. The automotive industry also has applications as frictionless, zero-wear motor drives are useful in fast automation applications.

Additional accessories can be attached such as encoder type, bake and counterbalance for vertical use, single or multi-axis ACS motion controllers, cables, multi-axis XY and XYZ-stage assemblies and granite support base. 

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